Tegal Corp 33-167-004 REV B Electrode Conductor 000468, 122426
Tegal Corp 33-167-004 REV B Electrode Conductor 000468, 122426(11148329) Tegal Corp 33-167-004 REV B Electrode Conductor 000468, 122426... Tegal Corp 33-167-004 REV B Electrode Conductor 000468, 122426(11148329)
...
Seller Refurbished
Our Price: 800.0
 
Tegal 86-100-044 Miniature Air Actuated Bellow Kit, 185366
Tegal 86-100-044 Miniature Air Actuated Bellow Kit, 185366(11212004) Tegal 86-100-044 Miniature Air Actuated Bellow Kit, 185366... Tegal 86-100-044 Miniature Air Actuated Bellow Kit, 185366(11212004)
...
New
Our Price: 350.0
 
TEGAL 30-191-002 HOSE, 179039
TEGAL 30-191-002 HOSE, 179039(11205891) TEGAL 30-191-002 HOSE, 179039... TEGAL 30-191-002 HOSE, 179039(11205891)
...
New
Our Price: 200.0
 
TEGAL 81-006-011 PCB ASSY, 181885
TEGAL 81-006-011 PCB ASSY, 181885(11209104) TEGAL 81-006-011 PCB ASSY, 181885... TEGAL 81-006-011 PCB ASSY, 181885(11209104)
...
New
Our Price: 300.0
 
Tegal 93-137-009, RF Cable, 410522
Tegal 93-137-009, RF Cable, 410522(0019096) Tegal 93-137-009, RF Cable, 410522... Tegal 93-137-009, RF Cable, 410522(0019096)
...
Used
Our Price: 95.0
 
TEGAL 40-575-003 CHUCK RING CERAMIC, 112989
TEGAL 40-575-003 CHUCK RING CERAMIC, 112989(11141987) TEGAL 40-575-003 CHUCK RING CERAMIC, 112989... TEGAL 40-575-003 CHUCK RING CERAMIC, 112989(11141987)
...
New
Our Price: 1450.0
 
Tegal 99-110-001 PCB, Top Display Panel TDP-1, 159303
Tegal 99-110-001 PCB, Top Display Panel TDP-1, 159303(11187338) Tegal 99-110-001 PCB, Top Display Panel TDP-1, 159303... Tegal 99-110-001 PCB, Top Display Panel TDP-1, 159303(11187338)
...
Used
Our Price: 515.0
 
Lot of 25 Tegal 80-202-188 O-RINGS, BLK, 179057
Lot of 25 Tegal 80-202-188 O-RINGS, BLK, 179057(11206212) Lot of 25 Tegal 80-202-188 O-RINGS, BLK, 179057... Lot of 25 Tegal 80-202-188 O-RINGS, BLK, 179057(11206212)
...
New
Our Price: 500.0
 
TEGAL 80-202-392 O-RING, SILVER, 181916
TEGAL 80-202-392 O-RING, SILVER, 181916(11209103) TEGAL 80-202-392 O-RING, SILVER, 181916... TEGAL 80-202-392 O-RING, SILVER, 181916(11209103)
...
New
Our Price: 150.0
 
Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001, 402644
Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001, 402644(0003134) Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001, 402644... Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001, 402644(0003134)
...
Used
Our Price: 450.0
 
Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410388
Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410388(0019175) Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410388... Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410388(0019175)
...
Used
Our Price: 425.0
 
Tegal 99-112-001 Top Display Control, 99-112-001RW, 30515-043919, 159260
Tegal 99-112-001 Top Display Control, 99-112-001RW, 30515-043919, 1592... Tegal 99-112-001 Top Display Control, 99-112-001RW, 30515-043919, 159260(11187356) Tegal 99-112-001 Top Display Control, 99-112-001RW, 30515-043919, 159260(11187356)
...
Seller Refurbished
Our Price: 695.0
 
TEGAL 39-292-003 ELECTRODE UPPER REM W/CUTOUT, ELCTD UPR , 159724
TEGAL 39-292-003 ELECTRODE UPPER REM W/CUTOUT, ELCTD UPR , 159724(11187775) TEGAL 39-292-003 ELECTRODE UPPER REM W/CUTOUT, ELCTD UPR , 159724... TEGAL 39-292-003 ELECTRODE UPPER REM W/CUTOUT, ELCTD UPR , 159724(11187775)
...
Seller Refurbished
Our Price: 500.0
 
Tegal 99-138-001 PCB Assembly, FAB 98-138-001, 411234
Tegal 99-138-001 PCB Assembly, FAB 98-138-001, 411234(0018602) Tegal 99-138-001 PCB Assembly, FAB 98-138-001, 411234... Tegal 99-138-001 PCB Assembly, FAB 98-138-001, 411234(0018602)
...
New
Our Price: 350.0
 
TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E TMC-4, 179056
TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E TMC-4, 179056(11206213) TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E TMC-4, 179056... TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E TMC-4, 179056(11206213)
...
Used
Our Price: 225.0
 
Lot of 5 Tegal 80-202-192 O-Ring, 179115
Lot of 5 Tegal 80-202-192 O-Ring, 179115(11206149) Lot of 5 Tegal 80-202-192 O-Ring, 179115... Lot of 5 Tegal 80-202-192 O-Ring, 179115(11206149)
...
New
Our Price: 250.0
 
TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH, 106423
TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH, 106423(11136318) TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH, 106423... TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH, 106423(11136318)
...
For Parts or Not Working
Our Price: 3500.0
 
Lot of 10 Tegal 80-202-397 O-Rings, BLK, 179170
Lot of 10 Tegal 80-202-397 O-Rings, BLK, 179170(11206104) Lot of 10 Tegal 80-202-397 O-Rings, BLK, 179170... Lot of 10 Tegal 80-202-397 O-Rings, BLK, 179170(11206104)
...
New
Our Price: 200.0
 
Lot of 6 Tegal 80-202-113 O-Rings, BLK, 179172
Lot of 6 Tegal 80-202-113 O-Rings, BLK, 179172(11206102) Lot of 6 Tegal 80-202-113 O-Rings, BLK, 179172... Lot of 6 Tegal 80-202-113 O-Rings, BLK, 179172(11206102)
...
New
Our Price: 300.0
 
Lot of 4 Tegal 80-202-189 O-RINGS, BLK, 179161
Lot of 4 Tegal 80-202-189 O-RINGS, BLK, 179161(11206113) Lot of 4 Tegal 80-202-189 O-RINGS, BLK, 179161... Lot of 4 Tegal 80-202-189 O-RINGS, BLK, 179161(11206113)
...
New
Our Price: 200.0
 
TEGAL 80-195-236 SEAL,METAL,320F0025, 164920
TEGAL 80-195-236 SEAL,METAL,320F0025, 164920(11192782) TEGAL 80-195-236 SEAL,METAL,320F0025, 164920... TEGAL 80-195-236 SEAL,METAL,320F0025, 164920(11192782)
...
New
Our Price: 45.0
 
TEGAL XJET-11503 TCU Elbow Fitting, 416192
TEGAL XJET-11503 TCU Elbow Fitting, 416192(0014555) TEGAL XJET-11503 TCU Elbow Fitting, 416192... TEGAL XJET-11503 TCU Elbow Fitting, 416192(0014555)
...
New
Our Price: 30.0
 
LOT OF 5 TEGAL 80-202-190 O-RING, 150804
LOT OF 5 TEGAL 80-202-190 O-RING, 150804(11178847) LOT OF 5 TEGAL 80-202-190 O-RING, 150804... LOT OF 5 TEGAL 80-202-190 O-RING, 150804(11178847)
...
New
Our Price: 225.0
 
Lot of 9 Tegal 80-202-396 O-RINGS, BLK, 179075
Lot of 9 Tegal 80-202-396 O-RINGS, BLK, 179075(11206184) Lot of 9 Tegal 80-202-396 O-RINGS, BLK, 179075... Lot of 9 Tegal 80-202-396 O-RINGS, BLK, 179075(11206184)
...
New
Our Price: 180.0
 
TEGAL 40-046-002 REV. A, WINDOW VIEWING QUARTS 4", 915E, 000904, 122257
TEGAL 40-046-002 REV. A, WINDOW VIEWING QUARTS 4", 915E, 000904,... TEGAL 40-046-002 REV. A, WINDOW VIEWING QUARTS 4", 915E, 000904, 122257(11148719) TEGAL 40-046-002 REV. A, WINDOW VIEWING QUARTS 4", 915E, 000904, 122257(11148719)
...
New
Our Price: 250.0
 
Tegal 39-152-005 CUP PL 5", 162132
Tegal 39-152-005 CUP PL 5", 162132(11190005) Tegal 39-152-005 CUP PL 5", 162132... Tegal 39-152-005 CUP PL 5", 162132(11190005)
...
Seller Refurbished
Our Price: 500.0
 
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159265
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159265(11187351) Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159265... Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159265(11187351)
...
Used
Our Price: 500.0
 
TEGAL 99-173-004 RF GENERATOR INTERFACE PCB BOARD, 143101
TEGAL 99-173-004 RF GENERATOR INTERFACE PCB BOARD, 143101(11171878) TEGAL 99-173-004 RF GENERATOR INTERFACE PCB BOARD, 143101... TEGAL 99-173-004 RF GENERATOR INTERFACE PCB BOARD, 143101(11171878)
...
Used
Our Price: 450.0
 
Tegal 99-114-001 PCB, MP Mechanism Controller MMC-1, 159258
Tegal 99-114-001 PCB, MP Mechanism Controller MMC-1, 159258(11187358) Tegal 99-114-001 PCB, MP Mechanism Controller MMC-1, 159258... Tegal 99-114-001 PCB, MP Mechanism Controller MMC-1, 159258(11187358)
...
Seller Refurbished
Our Price: 750.0
 
Tegal 93-248-001 Type 903 Cable, 187735
Tegal 93-248-001 Type 903 Cable, 187735(11213789) Tegal 93-248-001 Type 903 Cable, 187735... Tegal 93-248-001 Type 903 Cable, 187735(11213789)
...
Used
Our Price: 395.0
 
Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002, 410367
Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002, 410367(0019190) Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002, 410367... Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002, 410367(0019190)
...
Used
Our Price: 1550.0
 
Tegal 99-089-001 PCB, E6 Sensor w/ Cables, For 903 Or 915 Etcher/Asher, 162082
Tegal 99-089-001 PCB, E6 Sensor w/ Cables, For 903 Or 915 Etcher/Asher... Tegal 99-089-001 PCB, E6 Sensor w/ Cables, For 903 Or 915 Etcher/Asher, 162082(11190045) Tegal 99-089-001 PCB, E6 Sensor w/ Cables, For 903 Or 915 Etcher/Asher, 162082(11190045)
...
Used
Our Price: 75.0
 
Lot of 5 Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70, 410520
Lot of 5 Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70, 410520(0019098) Lot of 5 Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70, 410520... Lot of 5 Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70, 410520(0019098)
...
Used
Our Price: 40.0
 
Tegal 99-115-001 PCB EIC 1, 98-115-001 Rev A, 30515-043918, 162129
Tegal 99-115-001 PCB EIC 1, 98-115-001 Rev A, 30515-043918, 162129(11190008) Tegal 99-115-001 PCB EIC 1, 98-115-001 Rev A, 30515-043918, 162129... Tegal 99-115-001 PCB EIC 1, 98-115-001 Rev A, 30515-043918, 162129(11190008)
...
Used
Our Price: 450.0
 
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159314
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159314(11187317) Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159314... Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159314(11187317)
...
Used
Our Price: 500.0
 
Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410366
Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410366(0019191) Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410366... Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410366(0019191)
...
Used
Our Price: 600.0
 
Tegal 00755601 Temperature Display Board, PCB, 411210
Tegal 00755601 Temperature Display Board, PCB, 411210(0018622) Tegal 00755601 Temperature Display Board, PCB, 411210... Tegal 00755601 Temperature Display Board, PCB, 411210(0018622)
...
New
Our Price: 350.0
 
Lot of 10 Tegal 80-202-391 O-Rings, BLK, 178945
Lot of 10 Tegal 80-202-391 O-Rings, BLK, 178945(11205940) Lot of 10 Tegal 80-202-391 O-Rings, BLK, 178945... Lot of 10 Tegal 80-202-391 O-Rings, BLK, 178945(11205940)
...
New
Our Price: 150.0
 
TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001 402645
TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001 402645(0020774) TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001 402645... TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001 402645(0020774)
...
Used
Our Price: 195.0
 
Tegal 57-00031 Chuck Ring, T.I.C., VLSI, C3-59-8-2, 140842
Tegal 57-00031 Chuck Ring, T.I.C., VLSI, C3-59-8-2, 140842(11169644) Tegal 57-00031 Chuck Ring, T.I.C., VLSI, C3-59-8-2, 140842... Tegal 57-00031 Chuck Ring, T.I.C., VLSI, C3-59-8-2, 140842(11169644)
...
New
Our Price: 650.0
 
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159264
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159264(11187352) Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159264... Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159264(11187352)
...
Used
Our Price: 500.0
 
TEGAL 99-125-004 PCB UCT FRONT PANEL INTERFACE DISPLAY ITEM CD, 183332
TEGAL 99-125-004 PCB UCT FRONT PANEL INTERFACE DISPLAY ITEM CD, 183332... TEGAL 99-125-004 PCB UCT FRONT PANEL INTERFACE DISPLAY ITEM CD, 183332(11210499) TEGAL 99-125-004 PCB UCT FRONT PANEL INTERFACE DISPLAY ITEM CD, 183332(11210499)
...
Seller Refurbished
Our Price: 650.0
 
TEGAL 99-173-003 PCB BOARD, 140449
TEGAL 99-173-003 PCB BOARD, 140449(11169441) TEGAL 99-173-003 PCB BOARD, 140449... TEGAL 99-173-003 PCB BOARD, 140449(11169441)
...
Used
Our Price: 450.0
 
2 Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board, 409774
2 Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board, 409774(0019397) 2 Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board, 409774... 2 Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board, 409774(0019397)
...
For Parts or Not Working
Our Price: 1150.0
 
Lot of 13 Tegal 81-007-146 O-Ring, Seal Ring Pump for 80-095-397, 179110
Lot of 13 Tegal 81-007-146 O-Ring, Seal Ring Pump for 80-095-397, 1791... Lot of 13 Tegal 81-007-146 O-Ring, Seal Ring Pump for 80-095-397, 179110(11206154) Lot of 13 Tegal 81-007-146 O-Ring, Seal Ring Pump for 80-095-397, 179110(11206154)
...
New
Our Price: 260.0
 
Lot of 12 Tegal 80-202-061 O-Ring, BLK, 179325
Lot of 12 Tegal 80-202-061 O-Ring, BLK, 179325(11206439) Lot of 12 Tegal 80-202-061 O-Ring, BLK, 179325... Lot of 12 Tegal 80-202-061 O-Ring, BLK, 179325(11206439)
...
New
Our Price: 180.0
 
TEGAL 31-330-002 SENSOR, PIN UP CYL, BANNER ENGINEERING 86100019, 181790
TEGAL 31-330-002 SENSOR, PIN UP CYL, BANNER ENGINEERING 86100019, 1817... TEGAL 31-330-002 SENSOR, PIN UP CYL, BANNER ENGINEERING 86100019, 181790(11209199) TEGAL 31-330-002 SENSOR, PIN UP CYL, BANNER ENGINEERING 86100019, 181790(11209199)
...
New
Our Price: 375.0
 
TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE. 411522
TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE. 411522(0018402) TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE. 411522... TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE. 411522(0018402)
...
Used
Our Price: 450.0
 
TEGAL Front Robot Loader interface, 422608
TEGAL Front Robot Loader interface, 422608(0014949) TEGAL Front Robot Loader interface, 422608... TEGAL Front Robot Loader interface, 422608(0014949)
...
Used
Our Price: 9900.0
 
Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 122073
Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 122073(11153717) Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 122073... Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 122073(11153717)
...
Used
Our Price: 2100.0
 
Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410364
Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410364(0019193) Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410364... Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006, 410364(0019193)
...
Used
Our Price: 600.0
 
TEGAL 99-173-003 PCB BOARD, 140447
TEGAL 99-173-003 PCB BOARD, 140447(11169443) TEGAL 99-173-003 PCB BOARD, 140447... TEGAL 99-173-003 PCB BOARD, 140447(11169443)
...
Used
Our Price: 450.0
 
Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB, 410363
Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB, 410363(0019194) Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB, 410363... Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB, 410363(0019194)
...
Used
Our Price: 750.0
 
Tegal Load Lock Door Assy, 193938
Tegal Load Lock Door Assy, 193938(11220257) Tegal Load Lock Door Assy, 193938... Tegal Load Lock Door Assy, 193938(11220257)
...
Used
Our Price: 500.0
 
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159315
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159315(11187316) Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159315... Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159315(11187316)
...
Used
Our Price: 500.0
 
Lot of 48 Tegal 80-202-390 O-rings, 179106
Lot of 48 Tegal 80-202-390 O-rings, 179106(11206158) Lot of 48 Tegal 80-202-390 O-rings, 179106... Lot of 48 Tegal 80-202-390 O-rings, 179106(11206158)
...
New
Our Price: 720.0
 
Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005, 410365
Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005, 410365(0019192) Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005, 410365... Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005, 410365(0019192)
...
Used
Our Price: 600.0
 
TEGAL 93-064-001 CABLE GAS CONT TEMP ASSY, 179059
TEGAL 93-064-001 CABLE GAS CONT TEMP ASSY, 179059(11206210) TEGAL 93-064-001 CABLE GAS CONT TEMP ASSY, 179059... TEGAL 93-064-001 CABLE GAS CONT TEMP ASSY, 179059(11206210)
...
New
Our Price: 150.0
 
TEGAL 99-103-001 PCB, 140305
TEGAL 99-103-001 PCB, 140305(11170105) TEGAL 99-103-001 PCB, 140305... TEGAL 99-103-001 PCB, 140305(11170105)
...
Used
Our Price: 400.0
 
Tegal Load Lock Door Assy, 193937
Tegal Load Lock Door Assy, 193937(11220258) Tegal Load Lock Door Assy, 193937... Tegal Load Lock Door Assy, 193937(11220258)
...
Used
Our Price: 500.0
 
Tegal CM1104-00403 PCB ASSY, PRGM, MEM-VT20R, 182058
Tegal CM1104-00403 PCB ASSY, PRGM, MEM-VT20R, 182058(11208928) Tegal CM1104-00403 PCB ASSY, PRGM, MEM-VT20R, 182058... Tegal CM1104-00403 PCB ASSY, PRGM, MEM-VT20R, 182058(11208928)
...
New
Our Price: 450.0
 
TEGAL 39-627-012 CENTER RING W/ PEGS, 150442
TEGAL 39-627-012 CENTER RING W/ PEGS, 150442(11178581) TEGAL 39-627-012 CENTER RING W/ PEGS, 150442... TEGAL 39-627-012 CENTER RING W/ PEGS, 150442(11178581)
...
Used
Our Price: 150.0
 
TEGAL 99-125-004 PCB UCT FRONT PANEL INTERFACE DISPLAY ITEM CD, 123308
TEGAL 99-125-004 PCB UCT FRONT PANEL INTERFACE DISPLAY ITEM CD, 123308... TEGAL 99-125-004 PCB UCT FRONT PANEL INTERFACE DISPLAY ITEM CD, 123308(11150283) TEGAL 99-125-004 PCB UCT FRONT PANEL INTERFACE DISPLAY ITEM CD, 123308(11150283)
...
Used
Our Price: 500.0
 
Lot of 39 Tegal 80-202-129 O-Ring, BLK, 179300
Lot of 39 Tegal 80-202-129 O-Ring, BLK, 179300(11206244) Lot of 39 Tegal 80-202-129 O-Ring, BLK, 179300... Lot of 39 Tegal 80-202-129 O-Ring, BLK, 179300(11206244)
...
New
Our Price: 390.0
 
Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410334
Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410334(0019200) Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410334... Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410334(0019200)
...
Used
Our Price: 2100.0
 
Tegal 93-227-001 Cable, 165910
Tegal 93-227-001 Cable, 165910(11203831) Tegal 93-227-001 Cable, 165910... Tegal 93-227-001 Cable, 165910(11203831)
...
New
Our Price: 250.0
 
Lot of 3 TEGAL 80-202-393 O-RING, 182419
Lot of 3 TEGAL 80-202-393 O-RING, 182419(11209755) Lot of 3 TEGAL 80-202-393 O-RING, 182419... Lot of 3 TEGAL 80-202-393 O-RING, 182419(11209755)
...
New
Our Price: 150.0
 
Lot of 17 Tegal 80-202-154 O-Ring, 1/4 ID x 3/32W D70, 179112
Lot of 17 Tegal 80-202-154 O-Ring, 1/4 ID x 3/32W D70, 179112(11206152) Lot of 17 Tegal 80-202-154 O-Ring, 1/4 ID x 3/32W D70, 179112... Lot of 17 Tegal 80-202-154 O-Ring, 1/4 ID x 3/32W D70, 179112(11206152)
...
New
Our Price: 425.0
 
Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410336
Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410336(0019198) Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410336... Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410336(0019198)
...
Used
Our Price: 2100.0
 
Lot of 3 TEGAL 80-202-405 O-RING, 179109
Lot of 3 TEGAL 80-202-405 O-RING, 179109(11206155) Lot of 3 TEGAL 80-202-405 O-RING, 179109... Lot of 3 TEGAL 80-202-405 O-RING, 179109(11206155)
...
New
Our Price: 150.0
 
TEGAL 99-207-004 PCB MICRO PROCESSOR , 131037
TEGAL 99-207-004 PCB MICRO PROCESSOR , 131037(11160115) TEGAL 99-207-004 PCB MICRO PROCESSOR , 131037... TEGAL 99-207-004 PCB MICRO PROCESSOR , 131037(11160115)
...
Used
Our Price: 795.0
 
TEGAL 99-115-001 PCB BOARD EIC 1,30515-043918, 162414
TEGAL 99-115-001 PCB BOARD EIC 1,30515-043918, 162414(11190283) TEGAL 99-115-001 PCB BOARD EIC 1,30515-043918, 162414... TEGAL 99-115-001 PCB BOARD EIC 1,30515-043918, 162414(11190283)
...
Used
Our Price: 450.0
 
TEGAL 99-173-003 PCB BOARD, 140385
TEGAL 99-173-003 PCB BOARD, 140385(11169257) TEGAL 99-173-003 PCB BOARD, 140385... TEGAL 99-173-003 PCB BOARD, 140385(11169257)
...
Used
Our Price: 450.0
 
LOT OF 7 TEGAL 80-198-054 VALVE PNEU PPT 3WAY NO 24VDC, EVO-3M-24, 149204
LOT OF 7 TEGAL 80-198-054 VALVE PNEU PPT 3WAY NO 24VDC, EVO-3M-24, 149... LOT OF 7 TEGAL 80-198-054 VALVE PNEU PPT 3WAY NO 24VDC, EVO-3M-24, 149204(11177370) LOT OF 7 TEGAL 80-198-054 VALVE PNEU PPT 3WAY NO 24VDC, EVO-3M-24, 149204(11177370)
...
New
Our Price: 350.0
 
Tegal 98-125-002 PCB, 148566
Tegal 98-125-002 PCB, 148566(11176901) Tegal 98-125-002 PCB, 148566... Tegal 98-125-002 PCB, 148566(11176901)
...
Used
Our Price: 400.0
 
Lot of 3 Tegal 41-137-001, Chuck, BTTM Flag 903, 410518
Lot of 3 Tegal 41-137-001, Chuck, BTTM Flag 903, 410518(0004676) Lot of 3 Tegal 41-137-001, Chuck, BTTM Flag 903, 410518... Lot of 3 Tegal 41-137-001, Chuck, BTTM Flag 903, 410518(0004676)
...
Used
Our Price: 150.0
 
TEGAL 31-330-004 SENSOR, PIN DOWN CYL, BANNER ENGINEERING 86100020, 181806
TEGAL 31-330-004 SENSOR, PIN DOWN CYL, BANNER ENGINEERING 86100020, 18... TEGAL 31-330-004 SENSOR, PIN DOWN CYL, BANNER ENGINEERING 86100020, 181806(11209183) TEGAL 31-330-004 SENSOR, PIN DOWN CYL, BANNER ENGINEERING 86100020, 181806(11209183)
...
New
Our Price: 375.0
 
TEGAL 81-200-216 CABLE, 149077
TEGAL 81-200-216 CABLE, 149077(11177186) TEGAL 81-200-216 CABLE, 149077... TEGAL 81-200-216 CABLE, 149077(11177186)
...
Used
Our Price: 275.0
 
Tegal 99-207-003 PCB, 115497
Tegal 99-207-003 PCB, 115497(11144150) Tegal 99-207-003 PCB, 115497... Tegal 99-207-003 PCB, 115497(11144150)
...
Used
Our Price: 350.0
 
Lot of 3 TEGAL 80-041-002 PEN CHART RECORDER, 191845
Lot of 3 TEGAL 80-041-002 PEN CHART RECORDER, 191845(11218279) Lot of 3 TEGAL 80-041-002 PEN CHART RECORDER, 191845... Lot of 3 TEGAL 80-041-002 PEN CHART RECORDER, 191845(11218279)
...
New
Our Price: 150.0
 
TEGAL 99-115-001 PCB BOARD EIC 1,30515-043918, 162394
TEGAL 99-115-001 PCB BOARD EIC 1,30515-043918, 162394(11190262) TEGAL 99-115-001 PCB BOARD EIC 1,30515-043918, 162394... TEGAL 99-115-001 PCB BOARD EIC 1,30515-043918, 162394(11190262)
...
Used
Our Price: 450.0
 
Tegal 99-096-001 PCB, 702/703 Vacuum Hold VCH-1, 159307
Tegal 99-096-001 PCB, 702/703 Vacuum Hold VCH-1, 159307(11187334) Tegal 99-096-001 PCB, 702/703 Vacuum Hold VCH-1, 159307... Tegal 99-096-001 PCB, 702/703 Vacuum Hold VCH-1, 159307(11187334)
...
Used
Our Price: 685.0
 
Lot of 10 Tegal 80-202-183 O-Ring, BLK, 179111
Lot of 10 Tegal 80-202-183 O-Ring, BLK, 179111(11206153) Lot of 10 Tegal 80-202-183 O-Ring, BLK, 179111... Lot of 10 Tegal 80-202-183 O-Ring, BLK, 179111(11206153)
...
New
Our Price: 200.0
 
Tegal 99-110-001 PCB, Top Display Panel TDP-1, 159304
Tegal 99-110-001 PCB, Top Display Panel TDP-1, 159304(11187337) Tegal 99-110-001 PCB, Top Display Panel TDP-1, 159304... Tegal 99-110-001 PCB, Top Display Panel TDP-1, 159304(11187337)
...
Used
Our Price: 515.0
 
TEGAL 40-575-003 CHUCK RING CERAMIC, 86100032, 121923
TEGAL 40-575-003 CHUCK RING CERAMIC, 86100032, 121923(11147909) TEGAL 40-575-003 CHUCK RING CERAMIC, 86100032, 121923... TEGAL 40-575-003 CHUCK RING CERAMIC, 86100032, 121923(11147909)
...
Seller Refurbished
Our Price: 1450.0
 
Tegal 99-081-001 Gas Control Interface Assy, PCB, 99-081-001RW, 124752
Tegal 99-081-001 Gas Control Interface Assy, PCB, 99-081-001RW, 124752... Tegal 99-081-001 Gas Control Interface Assy, PCB, 99-081-001RW, 124752(11153447) Tegal 99-081-001 Gas Control Interface Assy, PCB, 99-081-001RW, 124752(11153447)
...
Used
Our Price: 300.0
 
TEGAL 99-118-001 PCB BOARD RF LINEARIZER RFL-1, 162415
TEGAL 99-118-001 PCB BOARD RF LINEARIZER RFL-1, 162415(11190282) TEGAL 99-118-001 PCB BOARD RF LINEARIZER RFL-1, 162415... TEGAL 99-118-001 PCB BOARD RF LINEARIZER RFL-1, 162415(11190282)
...
Used
Our Price: 450.0
 
TEGAL 81-200-216 CABLE, 149076
TEGAL 81-200-216 CABLE, 149076(11177187) TEGAL 81-200-216 CABLE, 149076... TEGAL 81-200-216 CABLE, 149076(11177187)
...
Used
Our Price: 275.0
 
Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 324878
Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10... Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 324878(0012012) Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 324878(0012012)
...
For Parts or Not Working
Our Price: 3700.0
 
Tegal 94-400-001, Harness Sensor, 410517
Tegal 94-400-001, Harness Sensor, 410517(0019100) Tegal 94-400-001, Harness Sensor, 410517... Tegal 94-400-001, Harness Sensor, 410517(0019100)
...
Used
Our Price: 425.0
 
TEGAL 99-207-004 PCB MICRO PROCESSOR, 140443
TEGAL 99-207-004 PCB MICRO PROCESSOR, 140443(11169447) TEGAL 99-207-004 PCB MICRO PROCESSOR, 140443... TEGAL 99-207-004 PCB MICRO PROCESSOR, 140443(11169447)
...
Used
Our Price: 795.0
 
Tegal 81-105-232 Valve H2O Pressure Regulator, 161905
Tegal 81-105-232 Valve H2O Pressure Regulator, 161905(11189819) Tegal 81-105-232 Valve H2O Pressure Regulator, 161905... Tegal 81-105-232 Valve H2O Pressure Regulator, 161905(11189819)
...
New
Our Price: 120.0
 
Tegal 93-067-001 Flat Cable, 188107
Tegal 93-067-001 Flat Cable, 188107(11214385) Tegal 93-067-001 Flat Cable, 188107... Tegal 93-067-001 Flat Cable, 188107(11214385)
...
Used
Our Price: 150.0
 
TEGAL 81-006-013 PCB, 4 WAY SPLITER/COMB, 181898
TEGAL 81-006-013 PCB, 4 WAY SPLITER/COMB, 181898(11209073) TEGAL 81-006-013 PCB, 4 WAY SPLITER/COMB, 181898... TEGAL 81-006-013 PCB, 4 WAY SPLITER/COMB, 181898(11209073)
...
Used
Our Price: 600.0
 
Tegal 37-198-004 Upper Electrode HP, Showerhead, Rad Holes, Anodized, 119356
Tegal 37-198-004 Upper Electrode HP, Showerhead, Rad Holes, Anodized, ... Tegal 37-198-004 Upper Electrode HP, Showerhead, Rad Holes, Anodized, 119356(11146448) Tegal 37-198-004 Upper Electrode HP, Showerhead, Rad Holes, Anodized, 119356(11146448)
...
Seller Refurbished
Our Price: 695.0
 
Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410335
Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410335(0019199) Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410335... Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410335(0019199)
...
Used
Our Price: 2100.0
 
Tegal 86-100-044 Miniature Air Actuated Bellow Kit, 192667
Tegal 86-100-044 Miniature Air Actuated Bellow Kit, 192667(11218930) Tegal 86-100-044 Miniature Air Actuated Bellow Kit, 192667... Tegal 86-100-044 Miniature Air Actuated Bellow Kit, 192667(11218930)
...
New
Our Price: 350.0
 
TEGAL 83-126-003 PCB AUX RF Controller Control Module Board, 32146C, 112728
TEGAL 83-126-003 PCB AUX RF Controller Control Module Board, 32146C, 1... TEGAL 83-126-003 PCB AUX RF Controller Control Module Board, 32146C, 112728(11148371) TEGAL 83-126-003 PCB AUX RF Controller Control Module Board, 32146C, 112728(11148371)
...
Used
Our Price: 945.0
 
TEGAL 40-046-001 WINDOW VIEWING QUARTZ 000904, 184724
TEGAL 40-046-001 WINDOW VIEWING QUARTZ 000904, 184724(11211631) TEGAL 40-046-001 WINDOW VIEWING QUARTZ 000904, 184724... TEGAL 40-046-001 WINDOW VIEWING QUARTZ 000904, 184724(11211631)
...
New
Our Price: 250.0
 
Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400
Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325... Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400(0014974) Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400(0014974)
...
New
Our Price: 14500.0
 
Tegal 40-140-003D, Ring, Insultator, Ceramic, 410361
Tegal 40-140-003D, Ring, Insultator, Ceramic, 410361(0019188) Tegal 40-140-003D, Ring, Insultator, Ceramic, 410361... Tegal 40-140-003D, Ring, Insultator, Ceramic, 410361(0019188)
...
New
Our Price: 2350.0
 
Tegal CE1004-00902 AC Power Supply, 132643
Tegal CE1004-00902 AC Power Supply, 132643(11161723) Tegal CE1004-00902 AC Power Supply, 132643... Tegal CE1004-00902 AC Power Supply, 132643(11161723)
...
Used
Our Price: 7500.0
 
Lot of 24 Tegal 80-202-130 O-Ring, BLK, 179299
Lot of 24 Tegal 80-202-130 O-Ring, BLK, 179299(11206245) Lot of 24 Tegal 80-202-130 O-Ring, BLK, 179299... Lot of 24 Tegal 80-202-130 O-Ring, BLK, 179299(11206245)
...
New
Our Price: 300.0
 
Lot of 16 Tegal 80-202-212 O-Ring, 5/16 ID x 1/8W D70, 179113
Lot of 16 Tegal 80-202-212 O-Ring, 5/16 ID x 1/8W D70, 179113(11206151) Lot of 16 Tegal 80-202-212 O-Ring, 5/16 ID x 1/8W D70, 179113... Lot of 16 Tegal 80-202-212 O-Ring, 5/16 ID x 1/8W D70, 179113(11206151)
...
New
Our Price: 400.0
 
TEGAL 29-478-001 KIT, FLD-CYL RP EICTD, 40-583-402, 42-960-003, 181469
TEGAL 29-478-001 KIT, FLD-CYL RP EICTD, 40-583-402, 42-960-003, 181469... TEGAL 29-478-001 KIT, FLD-CYL RP EICTD, 40-583-402, 42-960-003, 181469(11208274) TEGAL 29-478-001 KIT, FLD-CYL RP EICTD, 40-583-402, 42-960-003, 181469(11208274)
...
New
Our Price: 275.0
 
TEGAL 99-249-002 PCB BOARD, 131319
TEGAL 99-249-002 PCB BOARD, 131319(11160504) TEGAL 99-249-002 PCB BOARD, 131319... TEGAL 99-249-002 PCB BOARD, 131319(11160504)
...
Used
Our Price: 500.0
 
Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum, 410360
Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Alumin... Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum, 410360(0019189) Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum, 410360(0019189)
...
Used
Our Price: 350.0
 
Tegal 99-116-001 PCB, Bottom Control Panel BDP-1, 159305
Tegal 99-116-001 PCB, Bottom Control Panel BDP-1, 159305(11187336) Tegal 99-116-001 PCB, Bottom Control Panel BDP-1, 159305... Tegal 99-116-001 PCB, Bottom Control Panel BDP-1, 159305(11187336)
...
Seller Refurbished
Our Price: 650.0
 
TEGAL 80-872-002-24 STRAP, 189198
TEGAL 80-872-002-24 STRAP, 189198(11215294) TEGAL 80-872-002-24 STRAP, 189198... TEGAL 80-872-002-24 STRAP, 189198(11215294)
...
New
Our Price: 150.0
 
2 Tegal 80-871-045 Cable Assy, 24AWG W/CONN (RS-232C), 181879
2 Tegal 80-871-045 Cable Assy, 24AWG W/CONN (RS-232C), 181879(11209110) 2 Tegal 80-871-045 Cable Assy, 24AWG W/CONN (RS-232C), 181879... 2 Tegal 80-871-045 Cable Assy, 24AWG W/CONN (RS-232C), 181879(11209110)
...
New
Our Price: 450.0
 
Lot of 13 Tegal 80-202-389 O-Rings, 179133
Lot of 13 Tegal 80-202-389 O-Rings, 179133(11206116) Lot of 13 Tegal 80-202-389 O-Rings, 179133... Lot of 13 Tegal 80-202-389 O-Rings, 179133(11206116)
...
New
Our Price: 260.0
 
TEGAL 83-126-003 PCB AUX RF Controller Control Module Board, 32146C, 112727
TEGAL 83-126-003 PCB AUX RF Controller Control Module Board, 32146C, 1... TEGAL 83-126-003 PCB AUX RF Controller Control Module Board, 32146C, 112727(11150497) TEGAL 83-126-003 PCB AUX RF Controller Control Module Board, 32146C, 112727(11150497)
...
Used
Our Price: 945.0
 
Lot of 4 TEGAL 30-252-001 PIN SUB ASS4 6500, 181740
Lot of 4 TEGAL 30-252-001 PIN SUB ASS4 6500, 181740(11209240) Lot of 4 TEGAL 30-252-001 PIN SUB ASS4 6500, 181740... Lot of 4 TEGAL 30-252-001 PIN SUB ASS4 6500, 181740(11209240)
...
New
Our Price: 1600.0
 
TEGAL 99-118-001 PCB BOARD RF LINEARIZER RFL-1, 162522
TEGAL 99-118-001 PCB BOARD RF LINEARIZER RFL-1, 162522(11190412) TEGAL 99-118-001 PCB BOARD RF LINEARIZER RFL-1, 162522... TEGAL 99-118-001 PCB BOARD RF LINEARIZER RFL-1, 162522(11190412)
...
Used
Our Price: 500.0
 
Tegal 95-051-001 RF Match, 122029
Tegal 95-051-001 RF Match, 122029(11148393) Tegal 95-051-001 RF Match, 122029... Tegal 95-051-001 RF Match, 122029(11148393)
...
Used
Our Price: 9500.0
 
Tegal 94-484-001 Cable Assy, 410506
Tegal 94-484-001 Cable Assy, 410506(0019107) Tegal 94-484-001 Cable Assy, 410506... Tegal 94-484-001 Cable Assy, 410506(0019107)
...
Used
Our Price: 2500.0
 
TEGAL 99-173-004 RF GENERATOR INTERFACE PCB BOARD, 140506
TEGAL 99-173-004 RF GENERATOR INTERFACE PCB BOARD, 140506(11169399) TEGAL 99-173-004 RF GENERATOR INTERFACE PCB BOARD, 140506... TEGAL 99-173-004 RF GENERATOR INTERFACE PCB BOARD, 140506(11169399)
...
Seller Refurbished
Our Price: 750.0
 
LOT OF 3 TEGAL 80-202-190 O-RING, 189034
LOT OF 3 TEGAL 80-202-190 O-RING, 189034(11215446) LOT OF 3 TEGAL 80-202-190 O-RING, 189034... LOT OF 3 TEGAL 80-202-190 O-RING, 189034(11215446)
...
New
Our Price: 150.0
 
Tegal 99-086-001 PCB Auotune AOT-1, 159127
Tegal 99-086-001 PCB Auotune AOT-1, 159127(11187320) Tegal 99-086-001 PCB Auotune AOT-1, 159127... Tegal 99-086-001 PCB Auotune AOT-1, 159127(11187320)
...
Used
Our Price: 295.0
 
Tegal 94-484-001 Cable Assembly, 187653
Tegal 94-484-001 Cable Assembly, 187653(11213881) Tegal 94-484-001 Cable Assembly, 187653... Tegal 94-484-001 Cable Assembly, 187653(11213881)
...
Seller Refurbished
Our Price: 3000.0
 
TEGAL 80-645-008 METER, 190543
TEGAL 80-645-008 METER, 190543(11217429) TEGAL 80-645-008 METER, 190543... TEGAL 80-645-008 METER, 190543(11217429)
...
New
Our Price: 150.0
 
TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004, 107026
TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004, 107026(11136756) TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004, 107026... TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004, 107026(11136756)
...
Used
Our Price: 795.0
 
LOT OF 3 TEGAL 80-202-190 O-RING, 182418
LOT OF 3 TEGAL 80-202-190 O-RING, 182418(11209756) LOT OF 3 TEGAL 80-202-190 O-RING, 182418... LOT OF 3 TEGAL 80-202-190 O-RING, 182418(11209756)
...
New
Our Price: 150.0
 
4 TEGAL 80-202-361 BEARING, 184069
4 TEGAL 80-202-361 BEARING, 184069(11211057) 4 TEGAL 80-202-361 BEARING, 184069... 4 TEGAL 80-202-361 BEARING, 184069(11211057)
...
New
Our Price: 75.0
 
Lot of 6 Tegal 80-202-156 O-Rings, BLK, 179171
Lot of 6 Tegal 80-202-156 O-Rings, BLK, 179171(11206103) Lot of 6 Tegal 80-202-156 O-Rings, BLK, 179171... Lot of 6 Tegal 80-202-156 O-Rings, BLK, 179171(11206103)
...
New
Our Price: 300.0
 
Lot of 11 TEGAL 80-202-187 O-RING, 179037
Lot of 11 TEGAL 80-202-187 O-RING, 179037(11205893) Lot of 11 TEGAL 80-202-187 O-RING, 179037... Lot of 11 TEGAL 80-202-187 O-RING, 179037(11205893)
...
New
Our Price: 220.0
 
TEGAL 39-853-001 SPATULA 5", 150983
TEGAL 39-853-001 SPATULA 5", 150983(11178977) TEGAL 39-853-001 SPATULA 5", 150983... TEGAL 39-853-001 SPATULA 5", 150983(11178977)
...
New
Our Price: 150.0
 
Tegal 99-274-003 PCB, X8B-4 Shuttle, 136170
Tegal 99-274-003 PCB, X8B-4 Shuttle, 136170(11164980) Tegal 99-274-003 PCB, X8B-4 Shuttle, 136170... Tegal 99-274-003 PCB, X8B-4 Shuttle, 136170(11164980)
...
Used
Our Price: 295.0
 
TEGAL 38-023-001 COOLING RING, 150661
TEGAL 38-023-001 COOLING RING, 150661(11178770) TEGAL 38-023-001 COOLING RING, 150661... TEGAL 38-023-001 COOLING RING, 150661(11178770)
...
Seller Refurbished
Our Price: 350.0
 
TEGAL 39-431-002 REAC RF FEED THRU, 148763
TEGAL 39-431-002 REAC RF FEED THRU, 148763(11177127) TEGAL 39-431-002 REAC RF FEED THRU, 148763... TEGAL 39-431-002 REAC RF FEED THRU, 148763(11177127)
...
New
Our Price: 530.0
 
Tegal 37-202-003 Electrode, Lower, 8, 133843
Tegal 37-202-003 Electrode, Lower, 8, 133843(11162851) Tegal 37-202-003 Electrode, Lower, 8, 133843... Tegal 37-202-003 Electrode, Lower, 8, 133843(11162851)
...
Seller Refurbished
Our Price: 3500.0
 
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159263
Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159263(11187353) Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159263... Tegal 99-111-001 PCB, Sensor Interface Driver SID-1, 159263(11187353)
...
Used
Our Price: 500.0
 
Lot of 3 Tegal 80-202-190 O-Ring, BLK, 179324
Lot of 3 Tegal 80-202-190 O-Ring, BLK, 179324(11206440) Lot of 3 Tegal 80-202-190 O-Ring, BLK, 179324... Lot of 3 Tegal 80-202-190 O-Ring, BLK, 179324(11206440)
...
New
Our Price: 150.0
 
TEGAL 99-173-003 PCB BOARD, 140384
TEGAL 99-173-003 PCB BOARD, 140384(11169258) TEGAL 99-173-003 PCB BOARD, 140384... TEGAL 99-173-003 PCB BOARD, 140384(11169258)
...
Used
Our Price: 450.0
 
Tegal 99-172-003 PCB, Plasma Etcher, 136132
Tegal 99-172-003 PCB, Plasma Etcher, 136132(11165027) Tegal 99-172-003 PCB, Plasma Etcher, 136132... Tegal 99-172-003 PCB, Plasma Etcher, 136132(11165027)
...
Used
Our Price: 200.0
 
Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410337
Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410337(0019197) Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410337... Tegal 99-173-008 PCB, RFG-8, RF Gen Interface, 410337(0019197)
...
Used
Our Price: 2100.0
 
TEGAL 701-SP MN RF Match Plasma in-line etcher, 106424
TEGAL 701-SP MN RF Match Plasma in-line etcher, 106424(11136317) TEGAL 701-SP MN RF Match Plasma in-line etcher, 106424... TEGAL 701-SP MN RF Match Plasma in-line etcher, 106424(11136317)
...
For Parts or Not Working
Our Price: 3500.0
 
TEGAL 80-202-357 O-Ring, 146959
TEGAL 80-202-357 O-Ring, 146959(11175514) TEGAL 80-202-357 O-Ring, 146959... TEGAL 80-202-357 O-Ring, 146959(11175514)
...
New
Our Price: 150.0
 
Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410333
Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410333(0019201) Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410333... Tegal 99-223-002 PCB, DSN-2, Dual Sensor, 410333(0019201)
...
Used
Our Price: 2100.0
 
TEGAL 33-295-002 PIPE TUBE, 140435
TEGAL 33-295-002 PIPE TUBE, 140435(11169455) TEGAL 33-295-002 PIPE TUBE, 140435... TEGAL 33-295-002 PIPE TUBE, 140435(11169455)
...
Seller Refurbished
Our Price: 150.0
 
TEGAL 99-126-007 FRONT PANEL INTERFACE PCB, REV A, 990125-004 REV C, 116893
TEGAL 99-126-007 FRONT PANEL INTERFACE PCB, REV A, 990125-004 REV C, 1... TEGAL 99-126-007 FRONT PANEL INTERFACE PCB, REV A, 990125-004 REV C, 116893(11153656) TEGAL 99-126-007 FRONT PANEL INTERFACE PCB, REV A, 990125-004 REV C, 116893(11153656)
...
Used
Our Price: 1500.0
 
Tegal 99-118-001 PCB, RF Linearizer RFL-1, 156082
Tegal 99-118-001 PCB, RF Linearizer RFL-1, 156082(11184151) Tegal 99-118-001 PCB, RF Linearizer RFL-1, 156082... Tegal 99-118-001 PCB, RF Linearizer RFL-1, 156082(11184151)
...
Used
Our Price: 500.0
 
TEGAL 99-103-001 PCB, 140708
TEGAL 99-103-001 PCB, 140708(11170103) TEGAL 99-103-001 PCB, 140708... TEGAL 99-103-001 PCB, 140708(11170103)
...
Used
Our Price: 400.0
 
23 Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole, 329146
23 Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole, 329146(0015912) 23 Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole, 329146... 23 Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole, 329146(0015912)
...
Used
Our Price: 10.0
 
Tegal CE1004-00901 AC Power Supply, 132644
Tegal CE1004-00901 AC Power Supply, 132644(11161721) Tegal CE1004-00901 AC Power Supply, 132644... Tegal CE1004-00901 AC Power Supply, 132644(11161721)
...
Used
Our Price: 3500.0
 
Tegal 93-067-001 Flat Cable, 189430
Tegal 93-067-001 Flat Cable, 189430(11216140) Tegal 93-067-001 Flat Cable, 189430... Tegal 93-067-001 Flat Cable, 189430(11216140)
...
New
Our Price: 225.0
 
Lot of 12 Tegal 80-202-083 O-ring, 179108
Lot of 12 Tegal 80-202-083 O-ring, 179108(11206156) Lot of 12 Tegal 80-202-083 O-ring, 179108... Lot of 12 Tegal 80-202-083 O-ring, 179108(11206156)
...
New
Our Price: 240.0
 
Lot of 6 Tegal 80-202-110 O-Rings, BLK, 179173
Lot of 6 Tegal 80-202-110 O-Rings, BLK, 179173(11206101) Lot of 6 Tegal 80-202-110 O-Rings, BLK, 179173... Lot of 6 Tegal 80-202-110 O-Rings, BLK, 179173(11206101)
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New
Our Price: 300.0
 
Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410389
Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410389(0019174) Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410389... Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001, 410389(0019174)
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Used
Our Price: 425.0
 
Tegal 99-173-004 PCB, RFG-4, RF Gen Interface, 410387
Tegal 99-173-004 PCB, RFG-4, RF Gen Interface, 410387(0019176) Tegal 99-173-004 PCB, RFG-4, RF Gen Interface, 410387... Tegal 99-173-004 PCB, RFG-4, RF Gen Interface, 410387(0019176)
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Used
Our Price: 450.0
 
TEGAL 39-709-002 ELECTRODE, LOWER 5", 000468, 145557
TEGAL 39-709-002 ELECTRODE, LOWER 5", 000468, 145557(11174104) TEGAL 39-709-002 ELECTRODE, LOWER 5", 000468, 145557... TEGAL 39-709-002 ELECTRODE, LOWER 5", 000468, 145557(11174104)
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Used
Our Price: 590.0
 
Lot of 28 Tegal 80-202-191 O-Ring, 179107
Lot of 28 Tegal 80-202-191 O-Ring, 179107(11206157) Lot of 28 Tegal 80-202-191 O-Ring, 179107... Lot of 28 Tegal 80-202-191 O-Ring, 179107(11206157)
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New
Our Price: 560.0
 
LOT OF 3 TEGAL 80-202-190 O-RING, 150775
LOT OF 3 TEGAL 80-202-190 O-RING, 150775(11178909) LOT OF 3 TEGAL 80-202-190 O-RING, 150775... LOT OF 3 TEGAL 80-202-190 O-RING, 150775(11178909)
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New
Our Price: 150.0
 
Tegal 98-106-001 PCB, 122005
Tegal 98-106-001 PCB, 122005(11148055) Tegal 98-106-001 PCB, 122005... Tegal 98-106-001 PCB, 122005(11148055)
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Used
Our Price: 400.0
 
TEGAL 99-126-005 IGC-5 GAS CONTROL PCB BOARD, 140452
TEGAL 99-126-005 IGC-5 GAS CONTROL PCB BOARD, 140452(11169438) TEGAL 99-126-005 IGC-5 GAS CONTROL PCB BOARD, 140452... TEGAL 99-126-005 IGC-5 GAS CONTROL PCB BOARD, 140452(11169438)
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Used
Our Price: 650.0
 
TEGAL 81-006-013 PCB, 4 WAY SPLITER/COMB, 144565
TEGAL 81-006-013 PCB, 4 WAY SPLITER/COMB, 144565(11173079) TEGAL 81-006-013 PCB, 4 WAY SPLITER/COMB, 144565... TEGAL 81-006-013 PCB, 4 WAY SPLITER/COMB, 144565(11173079)
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Used
Our Price: 600.0
 
TEGAL CORP 99-196-003 ATI-3 AUTO TUNE T915 PCB BOARD, 140441
TEGAL CORP 99-196-003 ATI-3 AUTO TUNE T915 PCB BOARD, 140441(11169449) TEGAL CORP 99-196-003 ATI-3 AUTO TUNE T915 PCB BOARD, 140441... TEGAL CORP 99-196-003 ATI-3 AUTO TUNE T915 PCB BOARD, 140441(11169449)
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Used
Our Price: 250.0
 
2 Tegal 59-011-001, Linkage Top PL Latch, 416899
2 Tegal 59-011-001, Linkage Top PL Latch, 416899(0003358) 2 Tegal 59-011-001, Linkage Top PL Latch, 416899... 2 Tegal 59-011-001, Linkage Top PL Latch, 416899(0003358)
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New
Our Price: 195.0
 
Tegal 99-089-002 Cable Sensor Assy, PCB, 159852
Tegal 99-089-002 Cable Sensor Assy, PCB, 159852(11187909) Tegal 99-089-002 Cable Sensor Assy, PCB, 159852... Tegal 99-089-002 Cable Sensor Assy, PCB, 159852(11187909)
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Seller Refurbished
Our Price: 250.0
 
Tegal 39-927-022 Electrode, Lower, Non-Anodize, 133816
Tegal 39-927-022 Electrode, Lower, Non-Anodize, 133816(11162876) Tegal 39-927-022 Electrode, Lower, Non-Anodize, 133816... Tegal 39-927-022 Electrode, Lower, Non-Anodize, 133816(11162876)
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New
Our Price: 2500.0
 
Tegal 99-114-001 PCB, MP Mechanism Controller MMC-1, 159257
Tegal 99-114-001 PCB, MP Mechanism Controller MMC-1, 159257(11187359) Tegal 99-114-001 PCB, MP Mechanism Controller MMC-1, 159257... Tegal 99-114-001 PCB, MP Mechanism Controller MMC-1, 159257(11187359)
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Seller Refurbished
Our Price: 750.0
 
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