Farmon Inc. is an authorized distributor for LINTEC Mass Flow Controller, Liquid Controller and Vaporizer products.
Mass Flow Controller/Meter
GAS | Products For Gas Applications
Deploying advance technologies, Lintec has been focusing on developing high-performance mass flow controllers for next generation semiconductor industries. By addressing growing market demands for products with higher accuracy, reliability, speed and higher level of ultra-cleanliness, we are ready to serve more industries in the near future.
MC-10 Series: Mass flow controller contributes cost of ownership by quick delivery
Elastomer seal
Fast-acting solenoid actuator incorporated
Available between 10SCCM and 150SLM by 11 types
Option on the possible additional, RS-485 digital interface and VR function
By using metal case and various filters, stable operation can achieved through reduction of radio frequency noises and electromagnetic field interference
MC-1000L Series: Low cost of MFC ownership possible with elastomer seal attached
Elastomer seal
Fast-acting solenoid actuator incorporated
By using metal case and various filters, stable operation can be acheived through reduction of radio frequency noises and electromagnetic field interferences
MC-3000L Series: High performance mass flow controller with high accuracy of ±1.0%S.P. guaranteed
High accuracy ±1.0%S.P.
RS-485 digital interface
LINTEC’s original ambient temperature-compensated sensor incorporated
High-speed and high performance piezoelectric actuator
Long-term leak tightness ensured using metal seal
By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences
MC-3000L-TC Series: Mass flow controller with maximum operating temperature up to 120 °C
Maximum operating temperature of 120 °C
RS-485 digital interface
LINTEC’s original ambient temperature-compensated sensor incorporated
Highly functional upon installation of microprocessor
Diaphragm valve with small dead volume
High-speed and high performance piezoelectric actuator
By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences
MC-3000S Series: Mass flow controller equipped with?LINTEC’s original low pressure differential device to operate at low differential pressure environment
Low pressure differential device
RS-485 digital interface
LINTEC’s original ambient temperature-compensated sensor incorporated
Diaphragm valve with small dead volume
High-speed and high performance piezoelectric actuator
By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences
MM-3000L Series: Previous MC-3000L Series-based, highly efficient digital mass flow meter
RS-485 digital interface
LINTEC’s original ambient temperature-compensated sensor incorporated
Highly functional upon installation of microprocessor
Long-term leak tightness ensured using metal seal
By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences
MM-3000L-TN Series: Guaranteed operation up to 120 °C in high-temperature environment
Maximum operating temperature of 120 °C
RS-485 digital interface
LINTEC’s original ambient temperature-compensated sensor incorporated
Highly functional upon installation of microprocessor
Long-term leak tightness ensured using metal seal
By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences
Liquid Controller & Vaporizer
LIQUID | Products for Liquid Applications
Featuring liquid flow rate measurement and control technologies, LINTEC’s original vaporization and supply systems support advances in semiconductors, manufacturing development, solar panel production lines, and other high-technology industries of the next generation.
LC-3102L-NO: Highly-efficient digital mass flow controller with piezoelectric actuator incorporated within mass flow sensor for liquid applications
Operates as a liquid mass flow controller upon installation of piezoelectric actuator
RS-485 digital interface
LINTEC’s original ambient temperature-compensated sensor incorporated
Highly functional upon installation of microprocessor
High-speed and high efficiency piezoelectric actuator
VU-900 Series: Vaporizer providing stable vaporization of liquid source by preventing heat deterioration through reducing possibility of direct contact of liquid with vaporization chamber
High precision liquid vaporization system control using solenoid actuator
Most suitable for thermally unstable materials such as low-k, high-k, and various metals
Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating
Efficient liquid vaporization control when used in combination with LM-3000L Series
Pioneering the development of gas and liquid vaporization systems, LINTEC provides our customers with a variety of products besides mass flow controllers. By creating sophisticated products and providing low-carbon solutions to our society, we strive to become an innovation-driven company that makes the impossible possible.
CV-2000 Series: Pressure-control, high-speed-reaction valve that controls flow rates and concentration of gas and liquid
High-speed and high efficiency piezoelectric actuator
Long-term leak tightness ensured using metal seal
By using metal case and various filters, stable operation can be acheived through reduction of radio frequency noises and electromagnetic field interference.
Applicable to both the open and closed loop systems
CV-1000 Series: Solenoid actuator-equipped?control valve for liquid use
Efficient liquid control when used in combination with LM-3000L Series
High-speed and high efficiency solenoid actuator
Long-term leak tightness ensured using metal seal
By using metal case and various filters, stable operation can be acheived through reduction of radio frequency noises and electromagnetic field interference.
LVS Series: Compact-size vapor delivery system utilizing bothliquid mass flow meter and vaporizer
All-in-one design supports vapor supply with connection to various utilities
Changes of system setting are available upon request before factory shipment according to physical properties of the liquid used, volume of liquid supplied, and operating environment
Clean design considering maintenance issue
Various auto-purge functions equipped
Safe and stable design considering physical properties of liquid
FL Series: Multi gas mixer supplies multiple gas types with specified flow rates and concentration utilizing mass flow controller
Appropriately administering specific amount of gas mixture in accordance with the needs
Automatically supplying gas mixtures with constant concentrations without being affected by the concentrations of the gas supplied
Changes of system setting are available upon request before factory shipment according to physical properties of various gas types, volume supplied, and operating environment
Clean design considering maintenance issue
Various alarm functions equipped
Safe and stable design considering physical properties of gas
SVC Series: Baking unit delivers vaporized gas supply through a mass flow controller within an incorporated tank
Optimizing temperature control of the supply line to avoid liquefaction
All-in-one design supports vapor supply with connection to various utilities
Changes of system setting are available upon request before factory shipment according to physical properties of the liquid used, volume of liquid supplied, and operating environment
Clean design considering maintenance issue
Various alarm functions equipped
Safe and stable design considering physical properties of gas
