Condition : Used : An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used.
* Model = MESC Multiplex ICP ASE
* Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch)
* Description of Process = ASE (Advanced Silicon Etch, Bosch Process)
* Serial = 31143
* Wafer Size = 150mm
* Loader capacity = 2 wafer Carousel
* Chuck Type = Mechanical Weighted Clamp
* Process Gases:
* C4F8 = 300 SCCMS
* SF6 = 600 SCCMS
* O2 = 100 SCCMS
* AR = 100 SCCMS
* MFC's are Millipore FC2901 Series
* Turbo Pump = Leybold Mag 2000 CT
* RF Generator 1 = ENI ACG-3
* RF Generator 2 = AE RFG 3001 (Advanced Energy)
* Vacuum measurement = MKS Instruments
* Gate Valve = VAT throttling type gate valve
* Slit Valve = VAT Slit Valve
* Manuals = STS MESC Multiplex ICP Operator's and Modular Parts Catalogue
* Vacuum Pump Loadlock = Edwards Pump E2M40
* Vacuum Pump Process Module = Edwards Pump IQDP80 w/IQMB250 Blower (Intelligent Quiet Interface)
* Support Module = STS Controller Cabinet / AC Breaker Panel
We describe the items and the condition as best we can, if there are any questions or if you need more info, please contact us and we will reply the same day. No other accessories are being sold with the item (cables, manuals, software, etc.), unless it is mentioned in the description and shown in the picture. we do not have the capability to test these equipment, these are untested and we sell as is, see pictures for more details.
Farmon Inc. sells all equipment with no warranty, expressed or implied regardless of condition. Farmon inc. don't have the capability to verify this equipment. All sales are "As is and Where is" and are final with no returns or exchanges permitted. Farmon Inc. invites you to inspect our products prior to purchase. Please read our rules before buying our products.
- Buyer is responsible for all shipping and handling costs, including any applicable insurance, taxes, tariffs or duties. buyer pays actual shipping charges using your UPS or FedEx account.
- There will be a $0 handling fee for US and a $0 handling fee for International for this item.
- Please allow 3 business days for us to ship after payment is received.
- All buyers are welcome and inspect the equipment before purchasing them. Please email or contact us for more information.
- Buyer must sign shipping confirmation when the item is delivered. Whenever necessary.
- All sales are final and no returns are accepted.
Farmon Inc.
562 South Milpitas Blvd.
Milpitas, CA 95035
Hours of Operation: Mon-Fri 9am-4pm (PST/GMT-8)
Saturday and Sunday by appointment.
We are also interested in your unwanted or excess inventory. Please contact us for review and removal of your inventory.
We supply many other semiconductor components/equipment such as RF generators, chillers, turbo pumps, cryo pumps, MFC's, vacuum pumps and controllers, step motors and drivers, etc.
| Listing Name : | DC |
| MPN : | N/A |
