Alcatel AMS 4200 Plasma DRIE Etch Equipment, Deep Silicon Etch, EndPoint, 113478

Our Price:
487500.0
Item #:
11142231
Manufacturer:
Model #:
Plasma Etcher
Condition:
Used
Quantity

Condition  :    Used  :  An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used.

Please contact us for same day shipment.


Alcatel AMS 4200 DRIE Etch Equipment, with LoadLock and Robot Transfer Module, Controller Rack, RF Generator Rack.
Decon and decommissioned and sitting in our warehouse, seems complete. Please contact us for more info

Farmon ID: 113478

Tool Configuration:

MFG Date: 2008

Deep Silicon Etch Alcatel AMS 4200

- Brooks Platform

- Dual Loadlocks

- Magnatron 7

- Alcatel ACT 600M TMP Turbo 

- User Interface PC

- Transfer PC Process Chamber:  AMS X200

- sn MX2R 205 846

- Alcatel ACT 1300M TMP  Turbo

Process Gases:

- SF6 1000sccm

- C4F8 400sccm

- O2 100sccm

- O2 800sccm

- Ar 200sccm

- N2 1000sccm

- Ar

- CHF3 EDM

- CS200-11729

- sn CS11829

- 200/208VAC, 3 Phase, 50/60Hz Alcatel AMS X200

- snMC2R 205

 - CE Marked

- Qty 2 - SEMCO HV52000C - SEREN L301 RF

- Advanced Energy Dressler Cesar RF - ENI Spectrum B-3013 RF

- 208VAC, 3 Phase, 50/60Hz



Item has markings and residue due to use and handling. May be missing components, cables, and screws. Software not included. We are selling as used, sell as is, see pictures for more details. Any software licensing is buyer's responsibility.


Price is for whole assembly.

Please contact us if you need more information or arrange for shipment.


We describe the items and the condition as best we can, if there are any questions or you need more info, please contact us and we will reply the same day. No other accessories are being sold with the item (cables, manuals, software, etc.), unless it is mentioned in the description and shown in the picture. we do not have the capability to test these equipment, these are untested and we sell as is, see pictures for more detail.

Farmon Inc. sells all equipment with no warranty, expressed or implied regardless of condition. Farmon inc. don't have the capability to verify this equipment. All sales are "As is and Where is" and are final with no returns or exchanges permitted. Farmon Inc. invites you to inspect our products prior to purchase. Please email us at info@farmoninc.com or call us at (510)573-0047 to schedule a time. Please read our rules before buying our products.


- Buyer is responsible for all shipping and handling costs, including any applicable insurance, taxes, tariffs or duties. buyer pays actual shipping charges using your UPS or FedEx account.

- There will be a $0 handling fee for US and a $0 handling fee for International for this item.

- Please allow 3 business days for us to ship after payment is received.

- All buyers are welcome and inspect the equipment before purchasing them. Please email or contact us for more information.

- Buyer must sign shipping confirmation when item is delivered. Whenever necessary.

- All sales are final and no returns are accepted.


Farmon Inc.

562 South Milpitas Blvd.

Milpitas, CA 95035

(510)573-0047


Hours of Operation: Mon-Fri 9am-5pm

Saturday and Sunday by appointment.


We are also interested in your unwanted or excess inventory.  Please contact us for review and removal of your inventory.


We supply many other semiconductor components/equipment such as RF generators, chillers, turbo pumps, cryo pumps, MFC's, vacuum pumps and controllers, step motors and drivers, etc.

Non-Domestic Product : No
Custom Bundle : No
MPN : 4200
Modified Item : No

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